- Temperature Range: 5 - 40℃
- Humidity Range: 0 - 95%RH, non-condensing
- Power Supply: AC 220V, 50Hz/60Hz
- Power Consumption: 11W(Standby), 22W(Operation)
- Weight: 10.8kg
- Dimensions: 229mm X 430mm X 412mm
- Serial I/O: RS-485
- Certifications: EN 61000-6-1 to EN61000-6-4 (MFC)
MFC (Mass Flow Controller)
- Accuracy: 0.8% of set point for 10 – 100% FS
- Repeatability: 0.1% of set point for 10 – 100% FS
- Typical Setting Time: < 100ms of set point for 10 – 100% FS
- Flow Range: 0 – 5L/min
- Maximum Input Pressure: 10bar / 145psig
- Maximum Differential Pressure: 5bar / 73psig
- Warming-up time: 5sec